中文摘要：

为研究微压印过程中低黏度抗蚀剂流动状态对微压印成形精度的影响,对常温压印过程中抗蚀剂流动进行了有限元分析,系统研究了不同结构的模板占空比、宽厚比等压印工艺条件对抗蚀剂填充的影响,以及抗蚀剂流动对软模具的变形影响,得到了单双峰转换曲线及模具结构对抗蚀剂填充效率的影响曲线,从理论上分析了抗蚀剂流动特性,并进行了实验验证,进一步证明了仿真方法的可行性。

英文摘要：

Aiming at analyzing the flow behavior of low-viscosity resist used for room-temperature micro imprinting and its impact on the fidelity of pattern transfer,CFD（computational fluid dynamics） finite element simulation was conducted.Variations in tool geometry,resist thickness and micro imprinting working condition affected resist filling modes greatly.Finally,single-dual peak transfer curves and filling efficiency curves were plotted.The resist’s flow behavior was analyzed from both theory and experiments.The research here seeks to investigate the resist’s flow behavior and provides theoretical basis for optimizing fidelity of pattern transfer.