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中文摘要：
在纳米压印中，模具和聚合物之间的相互作用能对方的特征的图型转移质量有着重要影响，文中利用分子动力学分别选择聚二甲基硅氧烷（PDMS），聚乙烯（rE），聚甲基丙烯酸甲酯（PM）研究了他们和模具壁面之间在不同距离时，壁面和聚合物之间相互作用能的变化关系，并考虑聚合物填充过程中压强对模具壁面和聚合物之间相互作用的影响，以及聚合物聚合度对他们之间的影响。通过研究得出，聚合物和壁面之间相互作用能随距离的增大而减小，随聚合物聚合度的增加而增大；对于常温紫外压印，压强在233kPa左右时聚合物和模具壁面间的相互作用能出现了峰值点。
英文摘要：
In the process of nanoimprint lithography, the interaction energy between the mold and the polymer is the key factor to affect the final pattern quality. In this paper, the molecular dynamics analysis scheme was proposed to study the interaction between polymers including polydimethylsiloxane （PDMS）, polyethylene （PS）, polymethylmethacrylate（PMMA） and the mold, the influences to the interaction energy including the distance between the polymer and mold, the degree of polymerization and the pressure. The result indicates that： with the distance decreasing and the polymer degree of polymerization increasing, the interaction energy between the mold and the polymer increase. For UV-nanoimprint lithography, the pressure at the point of 233 kPa, the interaction energy comes to a peak.
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