中文摘要：

本文提供了一种新型ZnO基微型电极的设计方案,即将半导体材料ZnO纳米棒阵列作为电极材料,它能够保证电极无毒无害的基础上实现其微型结构的设计,其关键技术在于如何控制纳米棒的尺寸和取向.文中采用不同的化学方法（水热法、化学溶液沉积法等）生长ZnO纳米棒阵列,并通过改变实验条件控制纳米棒的尺寸和取向.研究结果表明,采用冰水CBD和两步CBD法可以有效地控制纳米棒的尺寸和取向.

英文摘要：

In the paper,we provided a new design of the microelectrode with the ZnO materials.The key technology of the microelectrode was the size and growth orientation of the ZnO nanorod arrays.So we mainly researched the size and growth orientation of the nanorods in the paper.ZnO nanorod arrays were fabricated by adjusting the experiment conditions with various chemical methods,such as the hydrothermal method and chemical bath deposition method.The results showed the nanorod arrays with better orientation and smaller size were grown by the cool water CBD method and the two-steps CBD method.