中文摘要：

采用表面溶胶-凝胶法在普通载玻片上制备TiO2纳米结构薄膜，用X射线光电子能谱仪（XPS）、X射线衍射仪（XRD）和原子力显微镜（AFM）分析薄膜组成结构及其表面形貌，用UMT-2型摩擦磨损试验机考察表面溶胶-凝胶法和传统体溶胶-凝胶法制备的TiO2薄膜的摩擦磨损性能，用扫描电子显微镜（SEM）观察分析薄膜表面及其磨痕表面形貌．结果表明，与传统体溶胶-凝胶法相比，表面溶胶-凝胶法制备的薄膜摩擦磨损性能得到明显改善．这是由于多次干燥过程在一定程度上避免了传统体溶胶-凝胶工艺的后续干燥和热处理过程中大量残留溶剂瞬时溢出而导致的结构缺陷，从而使得薄膜具有更高的致密性，降低了薄膜表面粗糙度，提高了抗磨性．

英文摘要：

TiO2 thin films were prepared by surface sol-gel process on the glass substrates. Their structure, composition, surface morphology were investigated by means of X-ray photoelectron spectroscopy, X-ray diffraction and atomic force microscopy. The tribologicalp roperties of the films were investigated with UMT22 friction and wear tester. The morphologies of the wear tracks of the thin films counterparts were examined using a scanningelectron microscope. Results show that, compared with traditional bulk sol-gel derived TiO2 thin films, the tribological properties of thin films was significantly improved. This is due to multi drying process can avoided structural defects resulting from instantaneous output of large volumes of solvent residues during drying and heat treatment in the case of traditional bulk sol-gel process. Improvement of friction and wear performance was attributed to a higher compact- ness.