Microstructure and Properties of the Cr–Si–N Coatings Deposited by Combining High-Power Impulse Magnetron Sputtering(HiPIMS) and Pulsed DC Magnetron Sputtering
- ISSN号:1006-7191
- 期刊名称:《金属学报:英文版》
- 时间:0
- 分类:TQ171.777.7[化学工程—玻璃工业;化学工程—硅酸盐工业] TM911.4[电气工程—电力电子与电力传动]
- 作者机构:[1]Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China, [2]Global Frontier R&D; Center for Hybrid Interface Materials,Pusan National University, Busan 609-735, South Korea
- 相关基金:supported by the Global Frontier Program through the Global Frontier Hybrid Interface Materials(GFHIM)of the National Research Foundation of Korea(NRF)funded by the Ministry of Science,ICT&Future Planning(No.2013M3A6B1078874); funded by the National Nature Science Foundation of China(No.51301181); the Tianjin Key Research Program of Application Foundation and Advanced Technology(No.15JCZDJC39700); the Tianjin Science and Technology correspondent project(No.16JCTPJC49500); the Innovation Team Training Plan of Tianjin Universities and colleges(No.TD12-5043)
中文摘要:
Tie-Gang Wang sytgwang @ 163.com
Kwang Ho Kim kwhokim @pusan.ac.kr