中文摘要：

概述了永磁材料在微机电系统（MEMS）中集成制造方法的研究进展,总结了当前用于制造永磁薄膜的电沉积、溅射、脉冲激光沉积（PLD）和粘结磁体微图形化等4种主要加工技术的优缺点和研究现状,并对未来的发展方向提出了一些观点。

英文摘要：

Recent progress in integrated micromachining methods of permanent magnetic materials in the application of micro-electro-mechanical systems（MEMS）is reviewed.Four major manufacturing technologies of permanent magnetic films,including electro-deposition,sputtering,pulsed laser deposition（PLD）and micro-bonded magnet are introduced.Their respective advantages and disadvantages are compared.Meanwhile,some suggestions of the future perspective are pointed out.