中文摘要：

为了提高微控制力矩陀螺的输出力矩,提出了一种微型控制力矩陀螺的设计方案。所设计的微型控制力矩陀螺用角振动代替了传统控制力矩陀螺的转动,由转子角振动系统及框架角振动系统组成,实现了基于科氏效应的控制力矩输出。通过框架角振动系统的电极位置居中设置及在玻璃上挖槽的设计,避免了静电吸合现象。四个完全相同的微型控制力矩陀螺构成一个阵列,每两个微型控制力矩陀螺的电压相位依次相差90°,即可消除寄生控制力矩并稳定力矩输出。所设计的微型控制力矩陀螺四单元阵列的力矩输出可达5.12×10-6 Nm。最后,设计了微型控制力矩陀螺两层可动结构的工艺流程,所设计的工艺流程尽管具有一定的复杂性和难度,但均采用了当前一些比较成熟的工艺步骤,具有一定的可行性,有望在微型航天器的姿态控制上得到应用。

英文摘要：

A novel micro control moment gyroscope（MCMG）with a large torque output is presented.In contrast with the traditional CMG,MCMG uses the angular vibration instead of angular rotation.The MCMG outputs the torque through a coupling of rotor angular vibration and gimbal angular vibration based on the Coriolis Effect.Through locating the electrodes in the centre of the MCMG and etching a trench in the glass wafer,the electrostatic pull-in effect is largely alleviated and the driving voltage is decreased.An array configuration using four MCMGs as an element stabilizes the overall torque output at the array level and eliminates the unwanted torques.The voltage phase differences between every two MCMGs are 90° in sequence.The torque output of the MCMG array is about 5.12×10-6 Nm.At last the process flow for this MCMG and possible applications in attitude control of a microsatellite is discussed.