中文摘要：

在应用电火花线切割技术切割半导体材料时,工具电极与工件之间的放电状态主要有空载、正常放电和短路3种状态。由于半导体电阻率较高,正常放电状态与短路状态的电压电流特性相似,难以区别,现提出基于电流脉冲概率模糊控制策略,解决正常状态和短路状态的无法鉴别问题。利用直线电机的高频响应特性,采用模糊控制算法控制工件＂进给-回退-再进给＂往复渐进式向前运动,并通过实验证明了此算法可以稳定实现速度的伺服控制,有效地改善表面质量。

英文摘要：

In the application of wire electrical discharge cutting （WEDM） technology in cutting semi- conductor materials, the discharge state of the tool electrode and the workpieee mainly includes no--load, normal discharge and short circuit. Due to the high resistivity of semiconductors, the voltage and current characteristics of normal discharge state and short--circuit state are quite similar, and it is difficult to dis- tinguish them. For this, fuzzy control algorithm is adopted to control the workpiece ＂feed--regression-- feed＂ movement based on the linear motor＇s high frequency response characteristics. And the experiment results show that the algorithm can achieve servo control of speed and improve the surface quality effectively.