中文摘要：

通过水热法使TiO2纳米棒阵列直接生长在叉指电极之间,并制备成湿度传感器。纳米棒疏松多孔,直径大约20 nm,长度1μm。在相对湿度6%-97%RH的范围内传感器的电阻变化达3个数量级,感湿曲线的线性较好,湿滞较小。由于纳米棒生长方向一致,形成了许多有利于水分子进出的水汽通道,有效提高了传感器的响应特性,该传感器的响应时间为2 s,恢复时间为6 s。

英文摘要：

TiO2 nanorod array is grown directly between Au interdigital electrodes by the hydrothermal method.The nanorods are grown vertically along the lateral surface of Au electrode to be prepared for humidity sensor. The nanorod array is a kind of loose and porous material,about 20 nm in diameter,1 μm in length. The resistance change range of the sensor has almost three orders of magnitude in humidity range of 6 %- 97 % RH,linearity of humidity sensing curve is better and hysteresis is little. Due to growth of nanorods in the same direction,form a lot of ordered channels of water vapor and is favorable to the entrance and exit of water molecule,it effectively improve response characteristic of the sensor,response time and recovery time of sensor is 2 s and 6 s,respectively.