位置：成果数据库 > 期刊 > 期刊详情页
A sandwiched flexible polymer mold for control of particle-induced defects in nanoimprint lithograph
  • ISSN号：0947-8396
  • 期刊名称：Applied Physics A-Materials Science & Processi
  • 时间：2013.1.1
  • 页码：123-128
  • 相关项目：新型复合纳米压印技术与应用
作者： Li, Bin|Zhang, Jizong|Ge, Haixiong|
同期刊论文项目
新型复合纳米压印技术与应用
期刊论文 5
同项目期刊论文
A dual-curable transfer layer for adhesion enhancement of a multilayer UV-curable nanoimprint resist
Double transfer UV-curing nanoimprint lithography
A fast thermal-curing nanoimprint resist based on cationic polymerizable epoxysiloxane
Crack-free controlled wrinkling of a bilayer film with a gradient interface