中文摘要：

在微尺度方面,力反馈能实现有效和可靠的操作,陈述了基于压阻式微悬臂梁传感器在微操作方面对酵母菌弹性模量的定量测量。采用惠斯通电桥采集微悬臂梁传感器信号,通过信号调理电路模块可以实现高分辨率的微力测量。在传感器力标定上,依靠激光多普勒干涉仪准确得出传感器探针变形量,校准探针能给出微悬臂梁作用力的大小,两者呈现较好的线性关系,分辨率达到纳牛级。基于此测力装置,实现了对酵母菌弹性模量的测量,测得酵母菌弹性模量为（2.9±2.2）MPa,表明该压阻式悬臂梁传感器能对微米级尺度的细胞进行力学测量。该传感器具有良好的稳定性、准确性、高精度和低成本等优点。

英文摘要：

A force feedback can realize an efficient and reliable handling in microscale.The quantitative measurement of a single yeast cell Young＇s modulus in micro-manipulation with the piezoresistive microcantilever sensor was introduced.The signal of the micro-cantilever sensor was acquired by the Wheatstone Bridge.The high resolution micro-force measurement was achieved through the signal conditioning circuit module.In the aspect of the sensor force calibration,the probe deflection of the sensor was obtained precisely by the laser Doppler interferometer,meanwhile,the force of the micro-cantilever was measured by the calibration probe,both presenting agood linear relationship,and the resolution of the piezoresistive cantilever reached nanonewton level.Based on the force-measured device,the measurment of the single yeast cell Young＇s modulus was realized.The measured young＇s modulus value is（2.9±2.2）MPa,showing that a piezoresistive cantilever sensor can be used in microscale force measurements.The piezoresistive cantilever sensor has some advantages,such as good stability,good accuracy,high precision and low cost.