中文摘要：

采用阳极氧化法在含氟的乙二醇溶液中以低碳钢为基体制备出高度有序排列的纳米管阵列结构氧化铁薄膜，并采用 SEM分析制备工艺参数对薄膜形貌和尺寸的影响；采用 XRD 和 XPS 对热处理前后薄膜表征.结果表明阳极氧化电压和氟离子浓度是影响薄膜形貌和纳米管尺寸最重要因素，在30~60 V 阳极氧化电压和0．03~0．1 mol/L NH4F范围内可以制备出管状结构的薄膜，且随阳极氧化电压升高，管径增加；随氟离子含量提高，管径增加.温度只是影响管状结构生长速度.经过500℃氩气气氛热处理后非晶态薄膜转化为主要由赤铁矿和少量磁铁矿构成的晶态薄膜.最后提出了纳米管形成机理.

英文摘要：

Thin films consisting of highly self-organized nanotube arrays were fabricated on carbon steel substrate in an a-queous ethylene glycol solution containing fluoride by anodization.It has been investigated by SEM that several synthesis parameters,such as anodizing voltage,anodizing time,concentration of fluoride ion and temperature affected on the morphology of the film comprising nanotube arrays and tube size.XRD and XPS techniques have been used to character-ize the nanotube arrays film.Results show that anodization voltage and concentration of fluoride ion are the key factors to effect on the morphology of the film and tube size.The nanotube structured film forms between 30 and 60 V,and in the range of 0.03 and 0.1 mol/L NH4F.The average pore diameter of the tubes increases with the increases of the anodiza-tion voltage and concentration of fluoride ion.Temperature only has an influence on the rate of tube formation of flim. Amorphous film transforms into the crystallized film composed of predominant hematite phase and minor magnetite phase.Finally,the possible growth of nanotube arrays was also proposed.