中文摘要：

阵列触觉的外接引线问题对传感器的制作工艺、信噪比和实际应用都有重要影响。本文介绍了一种用本地厚膜电路实现阵列触觉传感及其采样信号输出的方法，使压阻式点阵、间距为1mm的触觉传感器仅需6根外接引线。在给出传感器结构制作方法的基础上，对信号采样电路作了详细的阐述，并将各功能电路以厚膜电路的形式集成于传感器上，整个传感器完全实现小型化和外接引线最少化，能方便地应用在多种场合。最后，对传感器的多种性能指标进行了检测和评估。

英文摘要：

How many of the external leads in a tactile sensor array had a great impact on sensor＇s manufacturing process.signal-to-noise ratio （SNR） and actual applications. This paper introduces a method that using a local thick-film circuit to implement a tactile sensing array and the output of sampling signals, which makes a piezoresistive tactile sensor with a 16 × 16 array of taxels and a 1 mm interval only need 5 external leads. On the basis of presenting the structure and manufacturing process of a sensor, we also illustrate a data acquisition circuit. Because of selecting a process of integrating all functional circuits to a sensor in the form of a thick-film circuit, the whole sensor is miniaturized and its external lines are minimized, which makes it convenient to be utilized in a variety of fields. Finally, several properties of the sensor are tested and evaluated.