中文摘要：

提出了一种用于视网膜假体的基于Parylene的柔性微电极阵列的设计和制作。微电极阵列为5×5，通过光刻胶热熔回流技术形成的电极点为半球形凸起，底部直径为60／μm，高度大约为24μm。整个电极具有很好的柔韧性，能够更好的适应视网膜表面轮廓，提高刺激效果。同时，电极具有很好的透明性，便于手术时电极的植入和手术后对生物组织的观察。

英文摘要：

This paper presents the design and the process flow of Parylene-based flexible 5×5 microelectrode arrays. Trough the photoresist thermal melting technology, the electrodes have an approximately spherical shape. The height of the electrode of 60μm diameter is about 24μm. The electrode can conform to the geometry of the retina because of its flexibility, and its transparency will be favorable for the implant of the electrode in surgery and observations of the tissue during experiments.