中文摘要：

为实现六维力传感器的微型化与集成化，提出了一种新型的集成式应变计。该应变计由6组敏感栅组成，可与薄壁圆简型弹性体组成微型六维力传感器。文中介绍了信号调理电路和数字化电路的组成。采用微型数字信号处理器和刚柔结合的电路板实现了传感器的电路集成。对传感器进行了静动态标定并分析了实验结果。

英文摘要：

In order to fabricate an integrated miniature six-axis force sensor, a novel integrated strain gauge is presented. This strain gauge is made up of six sensitive grids. By attaching the strain gauge on a thin-walled elastic cylinder, a six-axis force sensor is obtained. The signal conditioning circuit and digital circuit are illustrated. Utilizing the small digital signal processor and the rigid-flexible printed circuit board, all circuits are integrated into the sensor body. The static and dynamic calibration of the force sensor is presented, and the results are discussed.