中文摘要：

自1986年发明原子力显微镜以来,它已成为材料、生物以及纳米科技等许多领域的重要工具。由于常规原子力显微镜成像速度缓慢,在动态过程观测、工业生产线原位测量以及高密度信息存储等领域的应用受到限制,因此发展高速原子力显微术近年来已引起国内外的高度关注。本文综述了高速原子力显微术关键技术（包括：微小探针、高速扫描器设计和控制方法）以及应用等方面的最近进展。

英文摘要：

Atomic force microscope（AFM） has become an important tool in the fields of material,biology and nano-science since it was invented in 1986.AFM provides a three-dimensional surface profile of insulating objects with atomic spatial resolution in atmosphere,liquid as well as vacuum.However,AFM imaging is slow and thus limited to observe quasi-static process.Recently,high speed atomic force microscopy（HSAFM） has been paid considerable attention for its potential applications in the study of biological dynamic process,in-situ measurement in industrial product line and ultra-high density storage.Centering on it,some researchers have done a lot of work making significant development in key technologies for improving the imaging speed of AFM and applications exploration.The author’s laboratory has also worked on HSAFM and got initial achievement.In the paper,recent progresses in key techniques of HSAFM including small cantilever,high speed scanner and control methods are reviewed,and its applications are briefly described.