中文摘要：

设计并制作了一种基于SiO2/Si材料的Mach-Zehnder干涉仪（MZI）型集成光波导传感芯片。采用不同浓度的NaCl溶液对传感芯片的敏感特性进行了测试分析,研究结果表明,该传感芯片对特定浓度NaCl溶液的响应和恢复时间分别为1.0 s和0.6 s,可测最小折射率变化为2×10-4RIU（单位折射率变化）,在NaCl溶液折射率1.3488~1.3736范围内具有较好的线性响应。

英文摘要：

An integrated Mach-Zehnder interferometer（MZI） sensor chip was designed and fabricated based on SiO2/Si.And the sensing properties were tested using NaCl solution.The tested results show that the response and recovery time of the chip to NaCl solution are 1.0 s and 0.6 s,respectively,the minimum detectable refractive index variation is 2×10-4 RIU,and a good linear response is presented within the refractive index from 1.348 8 to 1.373 6.The feasibility of applying the MZI platform for highly sensitive biological and chemical sensor was shown with the NaCl solution experiments.