中文摘要：

采用电子束光刻和ICP刻蚀等工艺制作出绝缘体上Si（SoI）基纳米线波导微环谐振（MRR）滤波器,波导截面尺寸为300 nm×320 nm,微环半径为5μm。测试结果表明,器件的自由频谱宽度（FSR）为16.8 nm,1.55μm波长附近的消光比（ER）为18.1 dB。通过对MRR滤波器进行热光调制,在21.4-60.0℃温度范围内实现了4.8 nm波长范围的可调谐滤波特性,热光调谐效率达到0.12 nm/℃。

英文摘要：

Microring-resonator filters are fabricated by E-beam photolithography and inductive-coupled-plasma（ICP） etching technology.The cross-section size of the strip waveguides is 300 nm×320 nm,and the bending radius of the microring is 5 μm.The measured results show that the free spectral range（FSR） and extinction ratio（ER） at the wavelength of 1 550 nm are 16.8 nm and 18.1 dB,respectively.After thermo-optic modulation,the tunable filter wavelength range reaches 4.8 nm,and the tuning efficiency is 0.12 nm /℃.