中文摘要：

微变形反射镜（MEMS-DMs）是用于自适应光学中波前校正的重要元件。对微变形镜波前校正原理进行了分析，设计了基于自适应光学系统的测试系统，通过闭环控制技术成功地利用一种分离式MEMS-DMs校正了实验系统中位相板引入的波前畸变，实验结果显示离焦项Zernike系数相对最大，是造成整个波面畸变的最重要的原因。MEMS-DMs对低阶波前畸变校正较好，高阶波前畸变校正时残余误差比较大，增加控制电极数量可以更好地校正高阶模式的波前畸变。基于自适应光学系统的MEMS-DMs波前畸变校正实验系统，可以为今后全面优化设计微变形反射镜及其更适应自适应光学系统的需要提供实验数据与理论支持。

英文摘要：

MEMS deformable mirror （MEMS-DMs） is a very important element in adaptive optical system. Theory analysis of correction ability to the static wavefront aberration of MEMS-DMs was described. Testing experiment based on adaptive optics system was made to test the correction ability of MEMS-DMs by closed-loop control technology triumphantly. The experimental results show that the wave surface deformation is mainly contributed from the defocusing Zernike coefficient. The MEMS-DMs can correct the low order wavefront distortion. When it corrected the high order wavefront distortion, the residual error was so large. The high order pattern wavefront distortion could be corrected by increasing the quantity of control electrode. The system that test the correction ability of MEMS-DMs based on adaptive optics system can offer support both in experiment and theory for further optimum design of MEMS-DMs system.