中文摘要：

利用离面双弯曲磁过滤阴极真空弧沉积系统,在单晶硅片上制备类金刚石薄膜.采用原子力显微镜观察薄膜表面形貌,采用激光拉曼光谱仪对薄膜的结构进行分析,采用多功能纳米力学性能测试仪测定薄膜的硬度、弹性模量及耐疲劳性能,采用微摩擦磨损试验机考察薄膜的摩擦磨损性能.结果表明：所制备的类金刚石薄膜表面光滑致密,硬度较高;镀膜参数中基体脉冲偏压占空比对薄膜的结构与性能有一定影响.

英文摘要：

Diamond-like carbon （DLC） films were deposited by filtered cathodic vacuum arc （FCVA） technique. The structure and topography of the films were studied by Raman spectroscopy and atomic force microscopy, respectively. The hardness and elastic modulus of the films were measured by Nano-indenter. Nano-impact tests were carried out to investigate the anti-fatigue properties of the films. The tribological property was investigated by micro tribo-tester. The results indicate that the DLC coatings are smooth and dense with high hardness. The structure and characters of the films were influenced by the duty ratio of pulse bias voltage applied on the Si substrate during the deposition. As the bias duty ratio increased, the sp3 content of the film increased, as a result, the hardness of the film increased. The film deposited with the bias ratio of 70% presented the best anti-fatigue properties. The film deposited with the bias ratio of 50% had the lowest friction coefficient.