基于微电子机械系统(MEMS)技术的原理,介绍了微机械加速度计、微机械陀螺和微惯性测量单元等微惯性传感器的研究发展状况与主要产品,以及目前微电子机械系统惯性传感器在汽车导航系统等系统总成上的应用现状。最后,从汽车工程应用的角度,分析了提高微惯性传感器测量精度的方法及其在汽车上安装使用应注意的关键问题。
Based On the principle of the micro electronic mechanical system technology,research and development of micro inertial sensors,sueh as micro mechanical acceleration meters,micro mechanical gyros and micro inertial measure units,etc.,and their main products are introduced.Application of micro electronic mechanical inertial sensors in automotive systems,such as automotive navigation systems,is also introduced.In the end,the methods for improving measure accuracy of the micro inertial sensors and key points for their installation on vehicles are analyzed from the view point of automotive engineering application.