中文摘要：

本文给出了一种基于轨迹分段线性化TPWL（Trajectory Piecewise-Linear）方法的非线性热电耦合宏建模技术。首先建立了MEMS热微执行器的三维非线性热电耦合模型,并采用有限元方法对其进行空间离散,然后利用新的基于全局最大误差控制的线性化点选择算法获得一组线性化点,最后使用TPWL方法构造MEMS热微执行器的热电耦合宏模型。以平板式热微执行器为例,研究了宏模型的精度、效率及可扩展性。与全模型仿真结果进行比较,宏模型仿真结果的相对误差可达到0.036%,加速比可达到100倍以上。

英文摘要：

Using the trajectory piecewise-linear（ TPWL） method,a nonlinear thermoelectric macromodeling technique for the thermal microactuator is presented. First,considering the coupling effects between thermal field and electric field as well as the temperature-dependence of material properties,a 3D nonlinear thermoelectric model for the thermal microactuator is established. And the finite element method（ FEM） is used to discrete the spatial derivatives in the thermoelectric model. Second,a new linearization point selection method,which is based on a global maximum error controller,is employed to select the linearization points. Finally,the thermoelectric macromodel for the thermal microactuator is obtained by using the TPWL method. The accuracy,efficiency and expandability of the macromodel are investigated by using the example of a thermomechanical in-plane microactuator. Compared with the simulation results of the nonlinear full-meshed model,the relative error of the macromodel can reach to 0. 036%. Moreover,the simulation of the macromodel is at least 100 times faster than the nonlinear full-meshed model.