中文摘要：

为了深入探讨带状波导的表面等离子激元透射特性,采用衍射光栅耦合方式实现表面等离子激元激发,通过改变金属薄膜厚度和入射光角度,得到薄膜厚度、入射光角度与透射率的变化特性.结果表明：金属薄膜厚度的减少会导致透射带宽迅速降低,同时透射率也随之降低;而入射光角度的改变导致透射光效率的变化.这一研究对于半导体设备的纳米等离子激元耦合具有一定的意义.

英文摘要：

In order to depth study transmission characteristics of surface plasmon polariton based on strip structure,surface plasmon polariton excitation was achieved by using grating coupling.The transmission characteristics which is relation to film thickness and incident angle were obtained though adopting to change he metal film thickness and angle of incident light.The results show that reduction of the metal film thickness will result in rapid transmission bandwidth reduction to a lower transmission rate.Moreover,the incident light angle changes as the efficiency of light transmission varies.The results are significant of nanoplasma polarization couple of semiconductor equipment research.