中文摘要：

为改善基于扫描电镜微纳遥操作系统的力觉临场感与稳定性,针对微纳遥操作系统提出一种基于滑模的阻抗控制策略。主操作手端应用阻抗控制策略,以提高主操作手的顺应性;从操作手端采用基于滑模的阻抗控制策略,解决从操作手端参数的不确定性问题。由于实现上述控制策略需要的微分控制信号难以直接获取,故在主/从控制策略中结合跟踪微分器技术进行在线获取。针对微纳遥操作系统工作于低频带,具有极大的力反馈增益（105以上）特点,利用Liewellyn稳定判据推导出小延时下系统稳定条件。仿真和实验表明：所提出控制策略具有良好的鲁棒性,能够提供精确的力觉临场感。位置跟踪阶段最大位移误差小于0.5μm;接触阶段操作者能够精确地感知从操作手端1μN接触力。

英文摘要：

In order to improve the tele-presence and stability of a scanning electron microscopy（SEM） based micro/nano tele-operation system, a sliding mode based impedance control scheme was proposed. Such a scheme features that impedance control strategy was applied to master to fulfill compliant control and sliding mode based impedance control strategy was adopted to slave to solve the parameter uncertainty problem. Tracking differentiator technology was integrated to the master/slave control strategy to obtain the derivative control signal of the micro/nano teleoperation system. Under the circumstance of low band and large gain of force feedback（105）, the stability condition of micro/nano teleoperation system was derived from Liewellyn criterion. The good robustness and accurate force tele-presence of the proposed sliding mode control approach were verified by simulation and experimental results. The maximum displacement error is less than 0.5μm during the location tracking process. The operator can precisely perceive 1μN contact force from the slave.