中文摘要：

利用射频（RF）磁控溅射方法制备了含氮磷酸锂（LiPON）薄膜.采用SEM、XRD、XPS等技术以及交流阻抗法和电位线性扫描法,研究了空气湿度对LiPON薄膜形貌、组成和性能的影响.结果表明,LiPON薄膜在湿度为40%的空气环境中放置24 h后,将发生明显的水解反应,使LiPON薄膜表面形貌变得疏松、局部突起;PH3和NH3的产生,使薄膜中磷元素和氮元素含量减少,而Li2CO3的生成,则使薄膜中碳元素和氧元素含量有明显的增加.LiPON电解质薄膜形貌和组成的变化,造成了薄膜电化学性能的严重恶化.

英文摘要：

Lithium phosphorus oxynitride （LiPON） thin films were prepared by radio frequency （RF） magnetron sputtering. The morphology, composition and electrochemical performance of LiPON electrolyte thin films placed in humid ambient were investigated using SEM, XRD and XPS, and electrochemical measurements of AC （alternating current） impedance and potential linear scanning, respectively. Obvious changes in surface morphology, composition and electrochemical properties were found for the as-deposited LiPON film placed in humid ambient with a relative humidity of 40% for 24 h. Results showed that the uniformity of the film surface became poor, the contents of phosphorous and nitrogen in LiPON film decreased due to its reaction with H20, releasing gaseous PH3 and NHa. In addition, the formation of Li2CO3 obviously increased the contents of carbon and oxygen in LiPON film. Therefore, LiPON thin films placed in humid ambient resulted in a bad effect on its electrochemical performance such as the ionic conductivity and the electrochemical stability window.