中文摘要：

采用355nm脉冲激光沉积（PLD）法以Li6．16V0.61Si0.39O5．36为靶制备了Li2O-V2O5-SiO2薄膜。由X射线衍射（XRD）、扫描电子显微镜（SEM）、表面轮廓、交流阻抗（ACI）、直流极化（DCP）等方法对薄膜的形貌、结构及电化学性能进行表征，讨论了Li2O-V2O5-SiO2薄膜电化学性能与其结构的关系。结果表明，该薄膜是一种元针孔和裂缝、厚度均匀、组成致密的非晶态结构；Li2O-V2O5-SiO2薄膜离子电导率与温度符合Arrhenius关系，离子迁移数接近1．0（tion〉99．999％），是一种性能良好的离子导体材料；Li2O-V2O5-SiO2薄膜室温时离子电导率达4．0×10^-7S／cm，而电子电导率仅为10^-11～10^-12S／cm，可作为电解质材料用于全固态薄膜锂电池。

英文摘要：

Using Li6.16V0.61Si0.39O5.36 as target, Li2O-V2O5-SiO2 film were deposited by 355nm reactive pulsed laser deposition （PLD）. The morphology, structure and electrochemical properties of Li2O-V2O5-SiO2 film were characterized by X-ray diffraction （XRD）, scanning electron microscope （SEM）, profile meter, AC impendence （ACI） and DC polarization （DCP） methods. The dependence of film＇s performances on structures was discussed. Results show that Li2O-V2O5-SiO2 film possesses a denser non-crystal structure with 4×10^-7S/cm ionic conductivity, 10^-11～10^-12S/cm electronic conductivity, ion transference number close to 1.0, uniform thickness and without any pinhole or crack on it＇s surface. The dependence of Li2O-V2O5-SiO2 film ionic conductivity on measured temperature is true of Arrhenius relation showing film excellent ionic conductivity and could be used as electrolyte material for all-sold-state thin film lithium battery.