中文摘要：

提出了一种按需有机气相喷印沉积成膜技术,以惰性气体为载气,携带高温有机蒸汽经由图形化喷嘴喷射,在基板上冷却沉积成形.以AlQ3为有机原料,使用单孔硅喷嘴研究了喷嘴直径、蒸发腔温度、基板温度、载气驱动压力、基板与喷嘴间距、电磁阀开启时间和基板扫描速度等控制参数对喷印图形尺寸的影响,同时进行了单孔喷嘴图形阵列沉积和阵列喷嘴的直接并行沉积实验.实验结果表明:该按需有机气相喷印沉积成膜系统可实现有机材料的精密图形化沉积.

英文摘要：

An organic vapor stamp jet printing technology was proposed .In this technique ,high tem‐perature organic vapor was carried by inert gas and deposit on the substrate via a template nozzle plate .The influence of control parameters ,such as nozzle diameter ,the evaporation room tempera‐ture ,substrate temperature ,carrier gas pressure ,distance between substrate and nozzle ,opening time of solenoid valve and scanning speed ,on the dimension of organic film deposition was analyzed with AlQ3 and single silicon nozzle .And experimental study on simple organic thin film patterns depo‐sition with high dimension and position precision was conducted by single nozzle scanning or array noz‐zle parallel jet prints . T he experimental results show that the organic vapor on‐demand jet printing system can accomplish the deposition of high precise organic thin film patterns .