中文摘要：

结合磁控溅射、lift-off工艺和脱合金法制备了纳米多孔金薄膜及其微电极结构。首先利用磁控溅射法和lift-off技术制备了金银合金叉指型微薄膜电极结构,然后采用浓硝酸通过脱合金方法进一步制备出纳米多孔金薄膜微电极结构。本文系统研究了腐蚀时间对磁控溅射金银合金薄膜去合金化所制备的纳米多孔金薄膜形貌、组分和结构的影响。利用X射线衍射、场发射扫描电子显微镜和透射电子显微镜表征了纳米多孔金薄膜微电极的结构和形貌。结果表明纳米多孔金主要呈现（111）晶面,且脱合金时间对纳米多孔结构形成与演化有明显的影响。随着腐蚀时间增加,纳米多孔金薄膜孔隙度增加,金韧带分布更加均匀,逐渐形成均匀的具有高表面积的开放式多孔结构。

英文摘要：

The fabrication of the microelectrodes with nano-porous gold thin films. First,the interdigital microelectrode arrays were fabricated on Si substrate by co-sputtering of Au and Ag targets and liftoff process. Next,the high densityof nano-pores was formed by etching away the Ag clusters from the Au-Ag alloy of the interdigital microelectrode arrays with concentrated nitric acid. Finally,the influence of the etching conditions on the nanostructures and characteristics of the microelectrode was investigated with X-ray diffraction,field emission scanning electron microscope and high resolution transmission electron microscopy. The results show that the etching time has a major impact on the size and density of nano-pores. To be specific,as the etching time increased,the porosity of the Au films mainly in Au（ 111） plane increased,resulting in extremely large specific surface areas because of the high density of open nano-pores; and the Au-ligament distribution became more uniform.