中文摘要：

微细铣削加工技术是具有较高相对精度的精密三维微小零件的制造技术,微零件尺寸和精度在很大程度上依赖于微切削刀具的切削性能。CVD金刚石膜作为一种具有众多卓越特性的功能材料,是制造新型超硬微铣刀的优越刀具材料。本文开展了硅微模具图形化法沉积金刚石膜微铣刀头的实验研究,成功制作了特征尺寸为25μm、50μm和100μm双层金刚石微铣刀头。SEM,ADE等分析结果表明采用的工艺能够获得表面质量好、形状和尺寸精度很高的金刚石微铣刀头,该工艺能够实现批量制造,是制作金刚石微铣刀的理想方法。

英文摘要：

Micro-milling technology can be used to fabricate 3D micro-workpiece with a relatively higher accuracy.The accuracy of the workpiece is,to a great extent,determined by the performance of micro-milling tools.CVD diamond can be used to produce superhard cutting tool because of its excellent properties.This paper is focused on the fabrication of two-layer diamond micro milling cutters using Graphical fabrication technique（GFT）.Micro milling cutters with feature size of 25 μm,50 μm and 100 μm were fabricated successfully using CVD deposition on micro silicon molds.The samples were tested by SEM and ADE.The results show that this technique is an ideal approach for the fabrication of diamond micro milling cutters,by which the diamond micro milling cutters can be prepared in batches with good surface quality,complex shape and precise dimension.