中文摘要：

以电感耦合等离子体（ICP）刻蚀工艺制备单晶硅微齿轮陈列模具，采用热丝法化学气相沉积（HFCVD）制备出结构精细的金刚石微齿轮，其齿顶圆直径约1．55mm、齿轮厚度10μm。应用扫描电镜分别观察了ICP刻蚀的硅微齿轮模具及CVD金刚石微齿轮，表明齿轮微结构形貌精细，金刚石微齿轮较好地复制了硅微细结构；Raman光谱分析表明微齿轮的金刚石质量较高。此工艺可以实现金刚石薄膜的精细图形化，为面向微机械应用的金刚石器件的经济批量制备提供了一种途径。

英文摘要：

Diamond microgears with tip diameter about 1.55 mm and thickness 10 μm were fabricated over silicon structrue using the process combined with silicon etching at inductively coupled plasma （ICP） and selective growth of diamond deposited by hot filament chemical vapour deposition （HFCVD）.The surface morphologies of microstructured silicon and diamond gears were characterized by scaning eletron microscopy（ SEM）, respectively. The investigation indicated that both microstructrues were fine and that the diamond microgears were duplicated precisely over the silicon microstructures etched at ICP. Then, laser Raman spectroscopy characterization demonstrated that the high-quaility polycrystallinediamond microgears were obtained. The results shown that this process can pattern precisely diamond thin films and it may offer a feasible approach to fabricate diamond components in batches at low-cost for diamond devices for micro-machine applications.