中文摘要：

螺旋相位片（Spiral phase plate简称SPP）是产生轨道角动量光束的一种重要光学器件，在光束调控、量子信息等领域有着重要应用．本文提出了一种基于计算机打印灰度掩膜的螺旋相位片的加工方法，详细讨论了SPP设计方法和光刻工艺，并实验制作了拓扑电荷为3的螺旋相位片，利用马赫一策德尔干涉仪实验对SPP产生涡旋光束进行了检测，获得良好的螺旋相位干涉图．本文的研究结果为低成本、高质量、高效率的螺旋相位片加工技术提供了一种有用途径．

英文摘要：

Spiral phase plate （SPP） can be used to generate orbital-angular-momentum （OAM） light beams which have great applications in optical manipulation, quantum information and so on. In this pa- per, we developed an economical method for fabricating SPP by employing the printed Continuous Gray- scale Mask （CGM）. The design approach and photolithography progress are discussed in detail. As the results, a practical SPP with topological charge t= 3 is fabricated and tested by optical surface profile （Counter GT） and Mach-Zehnder interferometer. Our results show a low-cost and high efficiency pro- cessing method to fabricate high quality SPP.