中文摘要：

为了解决真空中的沿面闪络现象制约真空绝缘系统的整体性能的问题，提出将一种具有优良的可加工性能及表面耐电性能的微晶玻璃（又称可加工陶瓷）引入真空绝缘领域，研究了氢氟酸的体积分数φ（HF）不同时处理可加工陶瓷样品前后其电学特性的变化。利用X射线衍射（XRD）技术，定性分析了φ（HF）不同时处理样品后表面的玻璃相的体积分数φ（GP）；采用光电结合的方法，测量了φ（HF）不同时处理样品在真空高压脉冲下的沿面闪络特性。φ（HF）不同时处理可加工陶瓷后，其表面φ（GP）和真空表面耐电性能均改变；φ（HF）越高，则样品表面的φ（GP）越低，真空耐电特性越好。通过氢氟酸处理可以腐蚀掉样品表面的玻璃相，从而改变了脱陷电子的“爬电高度”，进而影响了可加工陶瓷的真空表面耐电性能。

英文摘要：

Machinable ceramic, as a new kind of material that is composed of crystal phase and glass phase, has an excellent performance on machining and dielectric property. We prepared different machinable ceramic sample. The different glass-phase contents on surface of samples treated by hydrofluoric （HF） solutions of diverse concentrations affect their flashover characteristics in vacuum. The proportions of crystal to glass phase are measured by X-ray diffract meter （ XRD）, and their flashover characteristics are also investigated. It is found that the influences on flash over characteristics are closely associated with the concentrations of HE solutions; the higher concentration the HE solution is, the lower glass-phase content and better flashover characteristic samples will perform. The treatment on machinable ceramics by HF can partly erode the glass-phases of sample surface, which changes the flashover heights of free electrons and hence influences the surface insulation performances of machinable ceramics in vacuum.