在分析IEC-GCT器件结构与工作机理的基础上,利用器件分析工具Silvaco模拟了IEC阳极结构的参数变化对IEC-GCT器件通态特性和关断特性的影响。结果表明,阳极区和短路区掺杂浓度及阳极短路比对通态压降和关断时间有较大影响,覆盖在p阳极上的氧化层宽度对通态特性影响较小,并给出了优化设计后的结构参数。
Based on analysis for structure and operation mechanism of an IEC-GCT device,the influence of IEC anode structure parameters on turn-off and on-state characteristic is simulated by device analysis tools Silvaco.The results show that the p-anode and n + short region doping concentration and anode short rate have a greater effect on the conduction voltage drop and turn-off time,and the oxide width overlay on p-anode influences less on on-state characteristic.Optimized anode structure parameters are given.