中文摘要：

介绍了PIN光探测器的测试系统,具体说明了测试系统中各个组成部分的功能.利用该系统对PIN光探测器的S参数进行了测试,并结合分析法和优化法,在ADS软件中对PIN光探测器的小信号模型进行模型参数的提取,给出了具体的计算公式及不同偏置电压下模型的参数提取值.结果表明：在1~40 GHz的频率范围内,S参数的模拟结果与测量结果吻合良好,证明了该参数提取方法的有效性.

英文摘要：

The testing system of PIN photodiode detector was introduced, and its function was illustrated. A parameter extraction method to determine the small signal equivalent circuit model for PIN photodiodes was presented, with the help of the analytical method and empirical optimization procedure. The values of the intrinsic and extrinsic parameters of the PIN photodiodes were extracted by a set of closed form expressions derived from output reflection coefficient on wafer measurement. The results revealed that an excellent fit between measured and simulated when S-parameter ranged from 1 to 40 GHz, which omfirmed its effectiveness.