中文摘要：

探头线圈是电涡流传感器的最核心的部件,其设计参数对电涡流传感器的性能有直接影响。建立电涡流传感器探头线圈的等效模型,根据理论推导和ANSYS参数化建模仿真,分析探头线圈的设计参数对电涡流传感器线性度、灵敏度和测量范围的影响。根据所确定的设计参数,利用印刷电路板制造工艺,制作PCB板探头线圈,并测试了基于PCB板探头线圈的电涡流传感器的静态和动态性能。结果表明,PCB板探头线圈制造工艺成熟稳定,一致性很高,质量容易保证,基于PCB板探头线圈的电涡流传感器可以满足实际应用的需要。

英文摘要：

Probe coil is the core element of the eddy current sensor, and its design parameters have a direct impact on the performance of the eddy current sensor. In this research, the equivalent model of the eddy current sensor probe coil was firstly established; and then, the influence of probe coil design parameters on eddy current sensors linearity, sensitivity, and the measurement range were analyzed by theoretical derivation and ANSYS parametric modeling and simulation. According to the identified design parameters, the printed circuit board manufaeturing process was used to fabricate the PCB board probe coil, and the eddy current sensor probe coil＇s static and dynamic performance was tested based on PCB. The results show that the manufacturing technology of PCB probe coil is mature and stable with high consistency, and its quality is easy to be guaranteed. The PCB board eddy current sensor probe coil can meet the needs of practical application.