中文摘要：

在碳纤维增韧补强碳化硅陶瓷复合材料（ CFCC-SiC）表面制备了NiCr/NiSi薄膜热电偶。传感器结构自下而上依次为CFCC-SiC陶瓷基底、SiO2过渡层,Al2 O3绝缘层及NiCr/NiSi热电偶层。对所制备传感器进行了静态标定,其在300℃~700℃范围内具有稳定的热电动势输出,平均Seebeck系数为41.71μV/℃,传感器极限使用温度约为750℃。

英文摘要：

NiCr/NiSi thin film thermocouples were fabricated on the surface of carbon fiber reinforced silicon carbide ceramic composites（CFCC-SiC）. Structure of the sensor from bottom to top is sequentially CFCC-SiC ceramic substrate, SiO2 buffer layer,Al2 O3 insulated layer and NiCr/NiSi thin film thermocouple layer. The static calibration result of the thin film thermocouples shows that the sensor has a stable thermal electromotive force output from 300℃ to 700℃. The average Seebeck coefficient of the sensor is about 41. 71μV/℃,and its ultimate-use temperature is about 750℃.