中文摘要：

介绍了1种基于多光束干涉强度的弹流油膜厚度测量系统，包括其测量原理和测量系统的设计与组成．针对光弹流接触副，给出了简单易行的干涉级次判定方法．结果表明，该测量系统具有纳米量级的分辨率，可实现由纳米膜厚到微米膜厚的连续测量，适用于超薄弹流油膜厚度和微米级弹流油膜局部微小变化的研究．测量结果与已有的理论和研究结果吻合，证明了测量系统的可靠性．

英文摘要：

An elastohydrodynamic lubricating film thickness measuring system, based on multi-beam interferometry, has been introduced in this paper. The measurement principle and the instrumentation were discussed. A simple and efficient counting method was suggested in order to obtain the fringe order of measured points. It is demonstrated that the present measuring system can provide continuous measurement for the lubricating film from nano to micrometers thickness with a resolution of nanometer levels, and is capable of investigating ultra thin EHL film and tiny variation of EHL film.