中文摘要：

基于微光学技术设计得到了偏振稳定垂直腔面发射激光器结构，将亚波长光栅结构集成在上分布布拉格反射镜表面，光栅周期小于材料中光波长，透射波和反射波中仅包含零级衍射，避免了高级次衍射造成的损耗．集成光栅后不同偏振方向光阈值增益不同，从而实现偏振控制．实验结果显示，集成亚波长光栅结构后，整个激射过程中偏振方向被固定在平行于光栅槽方向上，获得偏振稳定激光输出，正交偏振抑制比大于12dB，且阈值电流仅增大7．14％．

英文摘要：

By introducing sub-wavelength grating into an oxide-confined 980-nm vertical-cavity surface-emitting laser （VCSEL）, the VC- SEL with a stable polarization is realized. A sub-wavelength zero-order grating period is smaller than the wavelength in the semicon- ductor medium. This choice avoids a reduction in efficiency due to higher diffracting light. After the grating is etched, the threshold gains of E-fields parallel and perpendicular to the grating groves direction are different. The polarization therefore would be controlled. Good laser characteristics are obtained： the orthogonal polarization suppression ratio is over 12 dB and the threshold current increases just 7.14%.