中文摘要：

提出了一种采用飞秒激光切割结合微细电阻滑焊制备3D金属微结构的工艺方法（微型化双工位金属箔叠层制造法,（Micro-DLOM））,并通过制备具有复杂形状的3D微型腔模具验证了该工艺方法的可行性。首先,以厚度为10μm的0Cr18Ni9不锈钢箔为基材,在110mW的飞秒激光功率、100μm/s的切割速度和0.75μm的切割补偿量下获得二维微结构,并分析了激光功率和切割速度对切割精度的影响;然后,利用微细电阻滑焊对多层二维微结构进行热扩散焊接,通过多层二维微结构的叠加拟合形成具有曲面特征的微型腔,并对焊接区进行了X射线衍射（XRD）分析。分析发现：微细电阻滑焊所产生的热量仅使焊接区主要物相的相对含量发生了变化,而没有使该区域产生新的物相。与UV-LIGA工艺相比,本工艺可以加工具有自由曲面特征的三维微结构,并且单层钢箔越薄,成形精度越高;与飞秒激光分层平面扫描烧蚀工艺相比,本工艺仅需切割每层二维结构的轮廓,提高了成形效率;与微细电火花加工工艺相比,虽然所成形的微型腔表面粗糙度相对较差,但却省去了制备微电极的工艺步骤,并且不存在微电极工作过程中的损耗问题,所以可以加工深宽比不受限制的微模具。

英文摘要：

On the basis of femtosecond laser cutting and micro electric resistance slip welding,a forming process named Micro Double-staged Laminated Object Manufacturing（Micro-DLOM） was proposed to fabricate a complex 3D micro-structure,and the feasibility of the forming process was demonstrated by fabrication of a complex 3D micro-cavity mold.Firstly,0Cr18Ni9 stainless steel foils with the thickness of 10 μm were cut by a femtosecond laser to get a 2D microstructure under a femtosecond laser power of 110 mW,a cutting speed of 0.1 mm/s and the cutting compensation quantity of 0.75 μm.Then,the influence of laser power,cutting speed on cutting precision was analysed,and the foils were welded together to get the 3D microstructure.For further study,the weld-zone was analysed by X-ray Diffractometry（XRD） and it was found that the phase of weld zone has not been changed but the content of phase changed.Compared with UV-LIGA,the Micro-DLOM can fabricate the 3D micro-structure with a free-form surface and the unrestricted ratio of depth to width.Moreover,the thinner the stainless steel foils the,the higher the processing accuracy is.Compared with femtosecond laser ablation,the Micro-DLOM only needs to cut every layer＇s outline and has a higher forming efficiency.Compared with micro-EDM,the 3D micro-structure fabricated by Micro-DLOM has a large surface roughness,but it needs not fabricate different microelectrode faces and can fabricate the 3D micro-structure with unrestricted ratio of depth to width.