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Influences of sputtering gas pressure and gas flow rate on microwave characteristics of FeCoAlO thin
  • ISSN号：0040-6090
  • 期刊名称：Thin Solid Films
  • 时间：2011.9.9
  • 页码：8292-8295
  • 相关项目：IC工艺下高频铁磁薄膜制备及其复杂磁各向异性构建
作者： Xu F|Xie QY|Phuoc N|Li SD|Ong CK|
同期刊论文项目
IC工艺下高频铁磁薄膜制备及其复杂磁各向异性构建
期刊论文 34 获奖 2
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