中文摘要：

可重入性使得半导体作业车间调度问题成为极其复杂的NP-Hard问题。现实中,生产调度部门与设备维护部门是分开制定自己的工作计划的,单方面的最优计划并不一定可以提高生产效率。所以,文中针对半导体可重入的作业车间调度,在考虑预防性维修的基础上,以最小化最大完工时间为优化目标,建立了可重入作业车间调度与设备预维修的联合优化数学模型。文中利用混合粒子群算法对该问题进行了求解。通过与独立决策模型对比,联合优化决策在解决半导体可重入作业车间调度与设备预维修联合优化方面更具有优越性。

英文摘要：

This paper focuses on a preventive maintenance plan and production scheduling problem under reentrant Job Shop in semiconductor production. Previous researches discussed production scheduling and preventive maintenance plan independently,especially on reentrant Job Shop. Reentrancy is a typical characteristic of semiconductor production. What＇s more,the equipment of semiconductor production is very expensive. So we establish an integrated and optimal mathematical model. In this paper,we use hybrid Particle Swarm Optimization algorithm to solve the problem. The proposed model is evaluated through some simple simulation experiments and the results show that the model works better than independent decision making model in terms of minimizing maximum completion time.