中文摘要：

提出了一种新的制作变间距光栅的方法,即利用软刻蚀在厚度变化的硅橡胶(PDMS)上制作等栅距的光栅结构,然后对其拉伸加载,使其成为变间距光栅.对所制作好的变间距光栅采用基于衍射原理的逐点扫描法检测其线密度的分布,同时用经典理论推导了光栅表面的线密度分布,并对两种方法所得结果进行了比较发现,检测结果与理论分析结果相吻合.研究结果表明,这种制作变间距光栅的方法是可行的,与传统的制作方法相比,具有间距连续变化、变化规律不受光路控制以及制作成本低等优点.

英文摘要：

A method of fabricating varied-line-spacing grating was introduced. After making the equal-line-space grating on the PDMS with varied-thickness by soft lithography, the PDMS was elongated which became varied-line-spacing grating. The density distribution of the grating was detected by point-by-point scanning method basing on the diffraction theory and deduced by classical theory respectively. Both of them can match well. The results show that the new method is feasible, and the advantages of this method are the line-spacing varies is continuous, the orderliness of variety wasn't limited by the optical path, and low cost.