中文摘要：

基于变间距光栅位移传感器的基本原理,研究了高线密度变化率全息平面变间距光栅的制作方法.所作的变间距光栅已应用在变间距光栅位移传感器中,原理样机测试结果表明,系统分辨率可以达到0.05 mm,相对误差可以控制在0.2% FS之内,优于设计指标.

英文摘要：

The principal of VLS grating position sensor and the method ot tabrlcatlon oI VLS gratings with holographic recording were briefly described. These gratings with large slope density distribution were used in position sensors. The preliminary results obtained were quite positive. The actual measurements show that the grating sensor has position resolution of 0.05 ram,and the relative error can be controlled in 0.2% FS.