中文摘要：

采用MIP-800C多功能离子渗镀设备,分别在H13钢表面及经表面渗氮后的H13钢表面渗镀TiN薄膜。对两种状态下渗镀的TiN薄膜层的形貌与相组成进行观察分析,并检测了其显微硬度及膜基结合力。结果表明,经表面渗氮后的H13钢表面渗镀的TiN薄膜较光滑致密,少有大颗粒出现;其显微硬度比未经表面渗氮渗镀的略高（由1831 HV0.025提高到2107HV0.025）,而膜基结合力（78 N）约为后者（44 N）的两倍。预先对H13钢进行表面渗氮能显著提高渗镀的TiN薄膜与基体的结合力及其力学性能。

英文摘要：

TiN films were deposited on H13 steel and pre-nitrided H13 steel by MIP-800C multifunction ion plating equipment.The morphology of the TiN film,phase composition,microhardness and adhesion to substrate were examined and analyzed.The results show that the TiN film of pre-nitrided H13 steel is smoother and denser and with less large particles than that on the nitriding-free surface of H13 steel because of that pre-nitrided layer on the surface of H13 steel makes Ti and N easy to be combined and form TiN.The microhardness of the former is slightly higher than that of the latter（1831 HV0.025 to 2107HV 0.025）,while the adhesion of TiN film to pre-nitrided H13 steel（78 N）is about double of that to nitriding-free H13 steel（44 N）.The adhesion to substrate and the performance of the TiN film can be significantly increased by pre-nitriding.