中文摘要：

提出了以压电叠堆作为驱动源的新型步进直线精密驱动器，分析了步进直线驱动器的工作原理，设计步进直线驱动器结构及其控制电压波形。为减少驱动器部件间摩擦，构建了滚动直线滑轨与驱动器结合的结构模型。制作了步进直线精密驱动器样机，并对样机进行实验测试，实验结果表明，驱动器的最小步距为0．05μm，最高运行速度为610μm／s，且运动性能稳定。

英文摘要：

A novel sophisticated stepping linear actuator was proposed based on piezoelectric stack as actuator element. Its working principle was analyzed, and the structure of the stepping linear actuator and control wave volt- age were designed. A model of actuator with linear rolling guide was established for reducing the sliding friction be- tween the parts of actuator. A prototype of actuator was made, and its performance was tested. The experimental results show that the actuator has minimum step distance of 0.05 μm and maximum speed of 610 μm/s, it works steadily.