中文摘要：

采用双向反射分布函数定量分析透明基底表面粗糙度，考虑到透明基底第二个界面的影响，从不透明基底双向反射分布函数入手，推导了实际测量的透明基底表面双向反射分布函数的表达式．依据此理论提出了通过分别测量两个表面的散射强度来联立求解透明基底实际表面反射分布函数和表面粗糙度谱的新方法．并将此结果与用原子力显微镜测量所获得的结果进行了比较，两者吻合较好．

英文摘要：

Bidirectional reflectance distribution function （BRDF） is used to quantify the surface roughness characterization of transparent substrates with taking into account of the effect of other interface. BRDF of transparent substrates is deduced from the BRDF of opaque substrates and a new method is presented to obtain surface roughness characterization of transparent substrates by measured BRDF of both interfaces of the transparent substrates respectively and two equations obtained above is solved. It is shown that the surface roughness characterization of transparent substrate calculated in terms of this new method agrees well with that obtained by atomic force microscopy （AFM） measurement.