中文摘要：

本工艺的金属布线类似于激光直接成型（LDS）技术,首先使用脉冲激光刻蚀材料表面直接成型,接着进行化学镀铜处理,最终在聚氨酯（PUR）表面得到镀铜线条.激光的脉冲频率、扫描速度、功率都会对镀线的质量有影响.分析脉冲重复频率对线条连续性的影响规律,并得到相应公式.公式表明,脉冲频率应大于等于75 kHz时,刻蚀线条才会连续.采用Phenom ProX型扫电子显微镜研究了激光参数对镀铜线条质量的影响.结果表明,当激光功率为7W,扫描速度3 m/s、脉冲重复频率75 kHz时,得到的镀铜线条质量最好.

英文摘要：

The metallization technology similar to laser direct structuring （LDS） technology was given below. Metal wiring was the first step to use a pulsed laser etching material formed directly on the surface, followed by electroless copper plating process, and ultimately a copperred line was obtained. The pulse repetition frequency, scanning speed and power of the laser would affect the quality of the line. By analyzing the influence of pulse repetition frequency on the continuity of lines, the conformed for mula showed that with the pulse frequency greater than or equal to 75 kHz, the lines would be continuous. The scanning electron microscope of Phenom ProX type was used to study the effect of laser parameters on the quality of the copperred lines. The results showed that with the laser power of 7 W, scanning speed of 3 m/s and pulse repetition frequency of 75 kHz, the copperred line quality was the best.