中文摘要：

电容式微机械超声换能器（CMUT）已成为一种重要的新型换能器，在医学成像领域的应用潜力得到了广泛关注。对CMUT超声换能器技术进行深入研究，对于提高我国超声医疗设备及其关键核心部件的竞争力有着重要意义。首先介绍了CMUT超声换能器制造工艺技术的发展过程和现状，其次总结了其在各种医学应用中的基本情况，包括器件的结构、尺寸和性能，最后分析了目前CMUT换能器技术存在的问题，并指出了CMUT换能器技术的未来发展趋势。

英文摘要：

Capacitive micro-machined ultrasonic transducer （CMUT） is a new type of ultrasonic transducer, attracting more and more attention in medical imaging field. The study of CMUT is of great significance to improve the competitiveness of China＇s ultrasound medical equipment and the key core components. The fabrication process of CMUT is introduced, and the applications of CMUT are summarized, including the structure, size and performance of CMUT. Finally, the existing problems of CMUT are analyzed, and the development trend of CMUT is put forward.