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中文摘要：
微电容检测电路需要测量由电容式微机械超声换能器产生的高频微弱且夹杂噪声的信号,针对此问题,文中首先设计了基于跨阻放大的检测电路;然后构建了检测电路的等效噪声模型,并根据噪声理论和叠加原理,推导了电路的输出噪声计算公式,进而算出电路噪声电压;最后通过水下测试系统的搭建验证了微电容检测电路的可行性,并测得电路实际检测精度为5 n A,与理论计算检测精度为相同量级,证明了文中提出的噪声模型与计算公式的正确性。
英文摘要：
Weak capacitance detection circuit needs to measure a high frequency, weak and mixed with the noise signal that comes from the capacitance micro-machined ultrasonic transducer.For this problem, firstly, the paper designed a detection circuit based on the transimpedance amplification.Then the paper built equivalent noise model of detection circuit and deduced formulas that was about output noise of the circuit according to the noise theory and the principle of superposition, and then calculated noise voltage of the circuit.Finally, the paper verified feasibility of the weak capacitance detection circuit through building underwater test system and measured the actual detection accuracy that was 5 nA, and the magnitude of detection accuracy was the same with magnitude of theoretical calculation.The results verified the correctness of the noise model and calculation formula that were proposed in this paper.
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