采用粉末冶金法制备了不同Pd负载量的多孔ITO材料,通过XRD、SEM、EDS等对相应的物相和显微组织进行了分析.结果显示:粉末冶金法制备的负载Pd的多孔ITO材料,孔隙较多,孔的大小和分布十分均匀.Pd以微小团簇弥散分布于ITO材料上,Pd的理论和实际负载量较一致,含量的多少对ITO材料的孔结构没有影响.通过对CO气体的灵敏度测试表明,Pd的负载能提高多孔ITO材料对CO气体的灵敏度,含量的多少对CO气体的灵敏度有较大影响.
Porous ITO gas sensing materials loaded with different amounts of Pd are successfully prepared by powder metallurgy method,whose phase and microstructure are then analyzed by XRD,SEM and EDS. The results show that: the porous ITO gas sensing materials loaded with different amounts of Pd have good pore porosity; the size and distribution is very uniform by powder metallurgy method; Pd disperses on the ITO material in the form of small clusters; the theoretical load of Pd is consistent with the actual load; and the amount of Pd bears little influence on the structure of Porous ITO Materials. Finally,it is shown through the test of the gas-sensing properties of CO that Pd load can improve the sensitivity of ITO porous materials for CO gas,and different contents of Pd have a great influence on sensitivity of CO gas.